Evaluation of Lab-scale EUV Microscopy using a Table-Top Laser Source

Bleiner, Davide; Staub, Felix; Guzenko, Vitaliy; Ekinci, Yasin; Balmer, Jürg (2011). Evaluation of Lab-scale EUV Microscopy using a Table-Top Laser Source. Optics communications, 284(19), pp. 4577-4583. Amsterdam: Elsevier 10.1016/j.optcom.2011.05.047

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Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Institute of Applied Physics

UniBE Contributor:

Bleiner, Davide; Staub, Felix and Balmer, Jürg

ISSN:

0030-4018

Publisher:

Elsevier

Language:

English

Submitter:

Factscience Import

Date Deposited:

04 Oct 2013 14:28

Last Modified:

06 Dec 2013 13:31

Publisher DOI:

10.1016/j.optcom.2011.05.047

Web of Science ID:

000294374700060

URI:

https://boris.unibe.ch/id/eprint/10161 (FactScience: 216009)

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