Irradiation of amorphous Ta42Si13N45 film with a femtosecond laser pulse

Romano, Valerio; Meier, M.; Theodore, N. D.; Marble, D. K.; Nicolet, M.-A. (2011). Irradiation of amorphous Ta42Si13N45 film with a femtosecond laser pulse. Applied physics. A, Materials science & processing, 104(1), pp. 357-364. Springer-Verlag 10.1007/s00339-010-6149-3

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Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Institute of Applied Physics

UniBE Contributor:

Romano, Valerio

Subjects:

600 Technology > 620 Engineering

ISSN:

0947-8396

Publisher:

Springer-Verlag

Language:

English

Submitter:

Markus Müller

Date Deposited:

17 Jul 2018 10:45

Last Modified:

05 Dec 2022 15:15

Publisher DOI:

10.1007/s00339-010-6149-3

BORIS DOI:

10.7892/boris.118111

URI:

https://boris.unibe.ch/id/eprint/118111

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