Competitive anion/anion interactions on copper surfaces relevant for Damascene electroplating

Hai, N.T.M.; Huynh, T.T.M.; Fluegel, A.; Arnold, M.; Mayer, D.; Reckien, W.; Bredow, T.; Broekmann, P. (2012). Competitive anion/anion interactions on copper surfaces relevant for Damascene electroplating. Electrochimica acta, 70, pp. 286-295. Kidlington, UK: Elsevier Science 10.1016/j.electacta.2012.03.054

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Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Departement of Chemistry and Biochemistry

UniBE Contributor:

Broekmann, Peter

ISSN:

0013-4686

Publisher:

Elsevier Science

Language:

English

Submitter:

Factscience Import

Date Deposited:

04 Oct 2013 14:37

Last Modified:

06 Dec 2013 13:36

Publisher DOI:

10.1016/j.electacta.2012.03.054

Web of Science ID:

000304497000037

URI:

https://boris.unibe.ch/id/eprint/14774 (FactScience: 221897)

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