Competitive anion/anion interactions on copper surfaces relevant for Damascene electroplating

Hai, N.T.M.; Huynh, T.T.M.; Fluegel, A.; Arnold, M.; Mayer, D.; Reckien, W.; Bredow, T.; Broekmann, P. (2012). Competitive anion/anion interactions on copper surfaces relevant for Damascene electroplating. Electrochimica acta, 70, pp. 286-295. Kidlington, UK: Elsevier Science 10.1016/j.electacta.2012.03.054

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Item Type:	Journal Article (Original Article)
Division/Institute:	08 Faculty of Science > Department of Chemistry, Biochemistry and Pharmaceutical Sciences (DCBP)
UniBE Contributor:	Broekmann, Peter
ISSN:	0013-4686
Publisher:	Elsevier Science
Language:	English
Submitter:	Factscience Import
Date Deposited:	04 Oct 2013 14:37
Last Modified:	05 Dec 2022 14:11
Publisher DOI:	10.1016/j.electacta.2012.03.054
Web of Science ID:	000304497000037
URI:	https://boris.unibe.ch/id/eprint/14774 (FactScience: 221897)