Analytical model for the sputtering of rough surfaces

Szabo, P.S.; Cupak, C.; Biber, H.; Jäggi, N.; Galli, A.; Wurz, P.; Aumayr, F. (2022). Analytical model for the sputtering of rough surfaces. Surfaces and Interfaces, 30, p. 101924. Elsevier 10.1016/j.surfin.2022.101924

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The sputtering yields of solids under ion bombardment are highly sensitive to the roughness of their surfaces. Understanding how sputtering is exactly affected by different surface morphologies is relevant especially for plasma-wall interaction in fusion reactors and space weathering of planetary surfaces. We present an analytical model that allows to calculate sputtering yields of random gaussian rough surfaces under arbitrary angles of incidence, taking into account local incidence angles, shadowing and redeposition of sputtered materials. Sputtering yields of a rough surface can then be calculated with the sputtering yield’s dependence on the ion incidence angle for a flat surface and a single statistical parameter, which characterizes the surface roughness. The model supports previous findings that the mean surface inclination angle is a well-suited parameter to describe the sputtering behavior of rough surfaces. Comparisons of the results to previous experiments and numerical simulations for various cases are presented, showing that the model allows to quantitatively reproduce sputtering yields of different samples over a wide range of roughness regimes.

Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Physics Institute > Space Research and Planetary Sciences
08 Faculty of Science > Physics Institute

UniBE Contributor:

Jäggi, Noah Victor; Galli, André and Wurz, Peter

Subjects:

500 Science > 520 Astronomy
600 Technology > 620 Engineering
500 Science > 530 Physics

ISSN:

2468-0230

Publisher:

Elsevier

Language:

English

Submitter:

Dora Ursula Zimmerer

Date Deposited:

09 Jun 2022 08:10

Last Modified:

05 Dec 2022 16:20

Publisher DOI:

10.1016/j.surfin.2022.101924

BORIS DOI:

10.48350/170519

URI:

https://boris.unibe.ch/id/eprint/170519

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