Study of a low-energy collimated beam electron source and its application in a stable ionisation gauge

Ma, Zhuoya; Li, Detian; Zhang, Huzhong; Wurz, Peter; Fausch, Rico Georgio; Cheng, Yongjun; Yao, Peng; Ge, Jinguo; Han, Xiaodong; Li, Gang; Wang, Yongjun; Dong, Changkun (2023). Study of a low-energy collimated beam electron source and its application in a stable ionisation gauge. Vacuum, 215, p. 112302. Elsevier 10.1016/j.vacuum.2023.112302

Text Study_of_a_low-energy_collimated_beam_electron_source_and_its_application_in_a_stable_ionisation_gauge_-_1-s2.0-S0042207X23004992-main.pdf - Published Version Restricted to registered users only Available under License Publisher holds Copyright. Download (3MB) | Request a copy

Stable ionisation vacuum gauges obtain stable sensitivity by controlling both the well-defined electron trajectory
and electron energy in the ionisation volume. To achieve this goal, a collimated electron beam and large ion-
isation cross-section are required as the electrons enter the ionisation volume. In this paper, a low-energy
electron source based on carbon nanotubes is designed to realise a collimated electron beam by the addition
of specialised deceleration and focus electrodes. The experimental transmission is approximately 25%, which is
in good agreement with the simulation results. Furthermore, a simulation study is carried out combining the
electron source with the components of a novel stable ionisation gauge. The numerical simulation results show a
sensitivity of 0.250 Pa-1. It provides an important reference for the development of stable ionisation gauge based
on the field emission cathode.

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