Laser trimming of amorphous Ta42Si13N45 thin films with ultrashort pulses

Meier, Matthias; Bertsch, Dietmar; Onda, Nico; Etter, Marco; Gutsche, Martin; Dommann, Alex; Romano, Valerio; Nicolet, Marc-A (2006). Laser trimming of amorphous Ta42Si13N45 thin films with ultrashort pulses. Microelectronic engineering, 83(11-12), pp. 2234-2237. Amsterdam: Elsevier 10.1016/j.mee.2006.10.010

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Item Type:	Journal Article (Original Article)
Division/Institute:	08 Faculty of Science > Institute of Applied Physics
UniBE Contributor:	Meier, Matthias, Romano, Valerio
ISSN:	0167-9317
Publisher:	Elsevier
Language:	English
Submitter:	Factscience Import
Date Deposited:	04 Oct 2013 14:47
Last Modified:	05 Dec 2022 14:14
Publisher DOI:	10.1016/j.mee.2006.10.010
Web of Science ID:	000243315700037
URI:	https://boris.unibe.ch/id/eprint/19544 (FactScience: 2292)