Laser trimming of amorphous Ta42Si13N45 thin films with ultrashort pulses

Meier, Matthias; Bertsch, Dietmar; Onda, Nico; Etter, Marco; Gutsche, Martin; Dommann, Alex; Romano, Valerio; Nicolet, Marc-A (2006). Laser trimming of amorphous Ta42Si13N45 thin films with ultrashort pulses. Microelectronic engineering, 83(11-12), pp. 2234-2237. Amsterdam: Elsevier 10.1016/j.mee.2006.10.010

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Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Institute of Applied Physics

UniBE Contributor:

Meier, Matthias and Romano, Valerio

ISSN:

0167-9317

Publisher:

Elsevier

Language:

English

Submitter:

Factscience Import

Date Deposited:

04 Oct 2013 14:47

Last Modified:

17 Mar 2015 21:47

Publisher DOI:

10.1016/j.mee.2006.10.010

Web of Science ID:

000243315700037

URI:

https://boris.unibe.ch/id/eprint/19544 (FactScience: 2292)

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