Polyvinylpyrrolidones (PVPs): Switchable Leveler Additives for Damascene Applications

Hai, N. T. M.; Furrer, Julien; Stricker, Florian; Huynh, T. M. T.; Gjuroski, Ilche; Luedi, N.; Brunner, T.; Weiss, F.; Fluegel, A.; Arnold, M.; Chang, I.; Mayer, D.; Broekmann, Peter (2013). Polyvinylpyrrolidones (PVPs): Switchable Leveler Additives for Damascene Applications. Journal of the electrochemical society, 160(12), D3116-D3125. The Electrochemical Society 10.1149/2.019312jes

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Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Departement of Chemistry and Biochemistry

UniBE Contributor:

Furrer, Julien; Gjuroski, Ilche and Broekmann, Peter

Subjects:

500 Science > 570 Life sciences; biology
500 Science > 540 Chemistry

ISSN:

0013-4651

Publisher:

The Electrochemical Society

Language:

English

Submitter:

Julien Henri Lucien Furrer

Date Deposited:

04 Jul 2014 15:17

Last Modified:

04 Jul 2014 15:17

Publisher DOI:

10.1149/2.019312jes

URI:

https://boris.unibe.ch/id/eprint/44091

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