Surface patterned polymer micro-cantilever arrays for sensing

Urwyler, Prabitha; Schift, Helmut; Gobrecht, Jens; Häfeli, Oskar; Altana, Mirco; Battiston, Felice; Mueller, Bert (2011). Surface patterned polymer micro-cantilever arrays for sensing. Sensors and Actuators A, 172(1), pp. 2-8. Elsevier 10.1016/j.sna.2010.12.007

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Microinjection molding was employed to fabricate low-cost polymer cantilever arrays for sensor applications. Cantilevers with micrometer dimensions and aspect ratios as large as 10 were successfully manufactured from polymers, including polypropylene and polyvinylidenfluoride. The cantilevers perform similar to the established silicon cantilevers, with Q-factors in the range of 10–20. Static deflection of gold coated polymer cantilevers was characterized with heat cycling and self-assembled monolayer formation of mercaptohexanols. A hybrid mold concept allows easy modification of the surface topography, enabling customized mechanical properties of individual cantilevers. Combined with functionalization and surface patterning, the cantilever arrays are qualified for biomedical applications

Item Type:

Journal Article (Original Article)

Division/Institute:

10 Strategic Research Centers > ARTORG Center for Biomedical Engineering Research > ARTORG Center - Gerontechnology and Rehabilitation

UniBE Contributor:

Urwyler-Harischandra, Prabitha

Subjects:

600 Technology > 620 Engineering

ISSN:

0924-4247

Publisher:

Elsevier

Language:

English

Submitter:

Prabitha Urwyler-Harischandra

Date Deposited:

11 Jul 2014 17:00

Last Modified:

20 Jul 2015 10:55

Publisher DOI:

10.1016/j.sna.2010.12.007

Uncontrolled Keywords:

Micro-cantilever, Polymer, Sensor, Injection molding, Nanoimprint lithography, Stamps, Mold

URI:

https://boris.unibe.ch/id/eprint/48977

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