High-density large-scale field emitter arrays for x-ray free electron laser cathodes

Guzenko, Vitaliy; Mustonen, Anna; Helfenstein, Patrick; Kirk, Eugenie; Tsujino, Soichiro (2013). High-density large-scale field emitter arrays for x-ray free electron laser cathodes. Microelectronic engineering, 111, pp. 114-117. Elsevier 10.1016/j.mee.2013.02.039

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High brightness electron sources are of great importance for the operation of the hard X-ray free electron lasers. Field emission cathodes based on the double-gate metallic field emitter arrays (FEAs) can potentially offer higher brightness than the currently used ones. We report on the successful application of electron beam lithography for fabrication of the large-scale single-gate as well as double-gate FEAs. We demonstrate operational high-density single-gate FEAs with sub-micron pitch and total number of tips up to 106 as well as large-scale double-gate FEAs with large collimation gate apertures. The details of design, fabrication procedure and successful measurements of the emission current from the single- and double-gate cathodes are presented.

Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Institute of Applied Physics

UniBE Contributor:

Mustonen, Anna

Subjects:

600 Technology > 620 Engineering

ISSN:

0167-9317

Publisher:

Elsevier

Language:

English

Submitter:

Martin Frenz-Lips

Date Deposited:

02 Jul 2014 15:58

Last Modified:

05 Oct 2015 09:07

Publisher DOI:

10.1016/j.mee.2013.02.039

BORIS DOI:

10.7892/boris.52971

URI:

https://boris.unibe.ch/id/eprint/52971

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