Broekmann, Peter (2012). Tailored Design of Suppressor Ensembles for Damascene and 3D-TSV Copper Plating. In: 12th International Fischer Symposium. Kiel, Germany. 06.04.2012.
Item Type: |
Conference or Workshop Item (Speech) |
|---|---|
Division/Institute: |
08 Faculty of Science > Department of Chemistry, Biochemistry and Pharmaceutical Sciences (DCBP) |
UniBE Contributor: |
Broekmann, Peter |
Subjects: |
500 Science > 570 Life sciences; biology 500 Science > 540 Chemistry |
Language: |
English |
Submitter: |
Tamara Leuenberger |
Date Deposited: |
07 Jul 2014 15:17 |
Last Modified: |
05 Dec 2022 14:35 |
URI: |
https://boris.unibe.ch/id/eprint/54411 (FactScience: 226090) |
Actions (login required)
 |
Edit item |