Tailored Design of Suppressor Ensembles for Damascene and 3D-TSV Copper Plating

Broekmann, Peter (2012). Tailored Design of Suppressor Ensembles for Damascene and 3D-TSV Copper Plating. In: 12th International Fischer Symposium. Kiel, Germany. 06.04.2012.

Item Type:

Conference or Workshop Item (Speech)

Division/Institute:

08 Faculty of Science > Departement of Chemistry and Biochemistry

UniBE Contributor:

Broekmann, Peter

Subjects:

500 Science > 570 Life sciences; biology
500 Science > 540 Chemistry

Language:

English

Submitter:

Tamara Leuenberger

Date Deposited:

07 Jul 2014 15:17

Last Modified:

07 Jul 2014 15:17

URI:

https://boris.unibe.ch/id/eprint/54411 (FactScience: 226090)

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