Mustonen, Anna; Guzenko, Vitaliy; Spreu, Christian; Feurer, Thomas; Tsujino, Soichiro (2014). High-density metallic nano-emitter arrays and their field emission characteristics. Nanotechnology, 25(8), 085203. Institute of Physics Publishing IOP 10.1088/0957-4484/25/8/085203
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We report the fabrication and field emission properties of high-density nano-emitter arrays with on-chip electron extraction gate electrodes and up to 106 metallic nanotips that have an apex curvature radius of a few nanometers and a the tip density exceeding 108 cm−2. The gate electrode was fabricated on top of the nano-emitter arrays using a self-aligned polymer mask method. By applying a hot-press step for the polymer planarization, gate–nanotip alignment precision below 10 nm was achieved. Fabricated devices exhibited stable field electron emission with a current density of 0.1 A cm−2, indicating that these are promising for applications that require a miniature high-brightness electron source.
Item Type: |
Journal Article (Original Article) |
|---|---|
Division/Institute: |
08 Faculty of Science > Institute of Applied Physics |
UniBE Contributor: |
Feurer, Thomas |
Subjects: |
600 Technology > 620 Engineering |
ISSN: |
0957-4484 |
Publisher: |
Institute of Physics Publishing IOP |
Language: |
English |
Submitter: |
Martin Frenz-Lips |
Date Deposited: |
05 Feb 2015 10:33 |
Last Modified: |
05 Dec 2022 14:39 |
Publisher DOI: |
10.1088/0957-4484/25/8/085203 |
BORIS DOI: |
10.7892/boris.62357 |
URI: |
https://boris.unibe.ch/id/eprint/62357 |
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