High-density metallic nano-emitter arrays and their field emission characteristics

Mustonen, Anna; Guzenko, Vitaliy; Spreu, Christian; Feurer, Thomas; Tsujino, Soichiro (2014). High-density metallic nano-emitter arrays and their field emission characteristics. Nanotechnology, 25(8), 085203. Institute of Physics Publishing IOP 10.1088/0957-4484/25/8/085203

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We report the fabrication and field emission properties of high-density nano-emitter arrays with on-chip electron extraction gate electrodes and up to 106 metallic nanotips that have an apex curvature radius of a few nanometers and a the tip density exceeding 108 cm−2. The gate electrode was fabricated on top of the nano-emitter arrays using a self-aligned polymer mask method. By applying a hot-press step for the polymer planarization, gate–nanotip alignment precision below 10 nm was achieved. Fabricated devices exhibited stable field electron emission with a current density of 0.1 A cm−2, indicating that these are promising for applications that require a miniature high-brightness electron source.

Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Institute of Applied Physics

UniBE Contributor:

Feurer, Thomas

Subjects:

600 Technology > 620 Engineering

ISSN:

0957-4484

Publisher:

Institute of Physics Publishing IOP

Language:

English

Submitter:

Martin Frenz-Lips

Date Deposited:

05 Feb 2015 10:33

Last Modified:

26 Jun 2016 01:57

Publisher DOI:

10.1088/0957-4484/25/8/085203

BORIS DOI:

10.7892/boris.62357

URI:

https://boris.unibe.ch/id/eprint/62357

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