Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

Dalcanale, Federico; Grossenbacher, Jonas; Blugan, Gurdial; Gullo, Maurizio R.; Lauria, Alessandro; Brugger, Jürgen; Tevaearai, Hendrik; Graule, Thomas; Niederberger, Markus; Kuebler, Jakob (2014). Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications. Journal of the European Ceramic Society, 34(15), pp. 3559-3570. Elsevier 10.1016/j.jeurceramsoc.2014.06.002

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An analysis about the effect of carbon enrichment of allylhydridopolycarbosilane SMP10® with divinylbenzene (DVB) as a promising material for electrical conductive micro-electrical mechanical systems (MEMS) is presented. The liquid precursors can be micropipetted and cured in polytetrafluoroethylene (PTFE) molds to produce 14 mm diameter disc shaped samples. The effect of pyrolysis temperature and carbon content on the electrical conductivity is discussed. The addition of 28.7 wt.% of DVB was found to be the optimum amount. Carbon was preserved in the microstructure during pyrolysis and the ceramic yield increased from 77.5 to 80.5 wt.%. The electrical conductivity increased from 10−6 to 1 S/cm depending on the annealing temperature. Furthermore, the ceramic samples obtained with this composition were found to be in many cases crack free or with minimal cracks in contrast with the behavior of pure SMP10. Using the same process we demonstrate that also microsized ceramic samples can be produced.

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