High-Resolution Chemical Depth Profiling of Solid Material Using a Miniature Laser Ablation/Ionization Mass Spectrometer

Grimaudo, Valentine; Moreno, Pavel; Riedo, Andreas; Neuland, Maike Brigitte; Tulej, Marek; Broekmann, Peter; Wurz, Peter (2015). High-Resolution Chemical Depth Profiling of Solid Material Using a Miniature Laser Ablation/Ionization Mass Spectrometer. Analytical chemistry, 87(4), pp. 2037-2041. American Chemical Society 10.1021/ac504403j

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High-resolution chemical depth profiling measurements of copper films are presented. The 10 μm thick copper test samples were electrodeposited on a Si-supported Cu seed under galvanostatic conditions in the presence of particular plating additives (SPS, Imep, PEI, and PAG) used in the semiconductor industry for the on-chip metallization of interconnects. To probe the trend of these plating additives toward inclusion into the deposit upon growth, quantitative elemental mass spectrometric measurements at trace level concentration were conducted by using a sensitive miniature laser ablation ionization mass spectrometer (LIMS), originally designed and developed for in situ space exploration. An ultrashort pulsed laser system (τ ∼ 190 fs, λ = 775 nm) was used for ablation and ionization of sample material. We show that with our LIMS system, quantitative chemical mass spectrometric analysis with an ablation rate at the subnanometer level per single laser shot can be conducted. The measurement capabilities of our instrument, including the high vertical depth resolution coupled with high detection sensitivity of ∼10 ppb, high dynamic range ≥10(8), measurement accuracy and precision, is of considerable interest in various fields of application, where investigations with high lateral and vertical resolution of the chemical composition of solid materials are required, these include, e.g., wafers from semiconductor industry or studies on space weathered samples in space research.

Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Physics Institute > Space Research and Planetary Sciences
08 Faculty of Science > Departement of Chemistry and Biochemistry
08 Faculty of Science > Physics Institute
10 Strategic Research Centers > Albert Einstein Center for Fundamental Physics (AEC)
10 Strategic Research Centers > Center for Space and Habitability (CSH)

UniBE Contributor:

Riedo, Valentine; Moreno, Pavel; Riedo, Andreas; Neuland, Maike Brigitte; Tulej, Marek; Broekmann, Peter and Wurz, Peter

Subjects:

500 Science > 570 Life sciences; biology
500 Science > 540 Chemistry
500 Science > 530 Physics
500 Science > 520 Astronomy
600 Technology > 620 Engineering
500 Science

ISSN:

0003-2700

Publisher:

American Chemical Society

Language:

English

Submitter:

Beatrice Niederhauser

Date Deposited:

27 Mar 2015 13:49

Last Modified:

28 Nov 2018 11:12

Publisher DOI:

10.1021/ac504403j

BORIS DOI:

10.7892/boris.65885

URI:

https://boris.unibe.ch/id/eprint/65885

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