Avdic, A.; Lugstein, A.; Wu, M.; Gollas, B.; Pobelov, I.; Wandlowski, T.; Leonhardt, K.; Denuault, G.; Bertagnolli, E. (2011). Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM-SECM. Nanotechnology, 22(14), p. 145306. Bristol, UK: Institute of Physics Publishing IOP 10.1088/0957-4484/22/14/145306
Full text not available from this repository. (Request a copy)We demonstrate a reliable microfabrication process for a combined atomic force microscopy (AFM) and scanning electrochemical microscopy (SECM) measurement tool. Integrated cone-shaped sensors with boron doped diamond (BDD) or gold (Au) electrodes were fabricated from commercially available AFM probes. The sensor formation process is based on mature semiconductor processing techniques, including focused ion beam (FIB) machining, and highly selective reactive ion etching (RIE). The fabrication approach preserves the geometry of the original AFM tips resulting in well reproducible nanoscaled sensors. The feasibility and functionality of the fully featured tips are demonstrated by cyclic voltammetry, showing good agreement between the measured and calculated currents of the cone-shaped AFM-SECM electrodes.
Item Type: |
Journal Article (Original Article) |
|---|---|
Division/Institute: |
08 Faculty of Science > Department of Chemistry, Biochemistry and Pharmaceutical Sciences (DCBP) |
UniBE Contributor: |
Wandlowski, Thomas |
ISSN: |
0957-4484 |
Publisher: |
Institute of Physics Publishing IOP |
Language: |
English |
Submitter: |
Factscience Import |
Date Deposited: |
04 Oct 2013 14:26 |
Last Modified: |
05 Dec 2022 14:08 |
Publisher DOI: |
10.1088/0957-4484/22/14/145306 |
Web of Science ID: |
000287970000007 |
URI: |
https://boris.unibe.ch/id/eprint/9574 (FactScience: 215331) |
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