Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM-SECM

Avdic, A.; Lugstein, A.; Wu, M.; Gollas, B.; Pobelov, I.; Wandlowski, T.; Leonhardt, K.; Denuault, G.; Bertagnolli, E. (2011). Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM-SECM. Nanotechnology, 22(14), p. 145306. Bristol, UK: Institute of Physics Publishing IOP 10.1088/0957-4484/22/14/145306

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We demonstrate a reliable microfabrication process for a combined atomic force microscopy (AFM) and scanning electrochemical microscopy (SECM) measurement tool. Integrated cone-shaped sensors with boron doped diamond (BDD) or gold (Au) electrodes were fabricated from commercially available AFM probes. The sensor formation process is based on mature semiconductor processing techniques, including focused ion beam (FIB) machining, and highly selective reactive ion etching (RIE). The fabrication approach preserves the geometry of the original AFM tips resulting in well reproducible nanoscaled sensors. The feasibility and functionality of the fully featured tips are demonstrated by cyclic voltammetry, showing good agreement between the measured and calculated currents of the cone-shaped AFM-SECM electrodes.

Item Type:

Journal Article (Original Article)

Division/Institute:

08 Faculty of Science > Departement of Chemistry and Biochemistry

UniBE Contributor:

Wandlowski, Thomas

ISSN:

0957-4484

Publisher:

Institute of Physics Publishing IOP

Language:

English

Submitter:

Factscience Import

Date Deposited:

04 Oct 2013 14:26

Last Modified:

08 Jun 2016 10:27

Publisher DOI:

10.1088/0957-4484/22/14/145306

Web of Science ID:

000287970000007

URI:

https://boris.unibe.ch/id/eprint/9574 (FactScience: 215331)

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