Bergamin, Maxime

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Journal Article

Whitlow, Harry J.; Norarat, Rattanaporn; Roccio, Marta; Jeanneret, Patrick; Guibert, Edouard; Bergamin, Maxime; Fiorucci, Gianni; Homsy, Alexandra; Laux, Edith; Keppner, Herbert; Senn, Pascal (2015). MeV ion beam lithography of biocompatible halogenated Parylenes using aperture masks. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 354, pp. 34-36. Elsevier 10.1016/j.nimb.2014.10.024

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