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Prochazka, Lukas; Huber, Alexander; Dobrev, Ivo; Harris, Francesca; Dalbert, Adrian; Röösli, Christoph; Obrist, Dominik; Pfiffner, Flurin (2019). Packaging Technology for an Implantable Inner Ear MEMS Microphone. Sensors, 19(20) MDPI 10.3390/s19204487
