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Romano, Valerio; Meier, M.; Theodore, N. D.; Marble, D. K.; Nicolet, M.-A. (2011). Irradiation of amorphous Ta42Si13N45 film with a femtosecond laser pulse. Applied physics. A, Materials science & processing, 104(1), pp. 357-364. Springer-Verlag 10.1007/s00339-010-6149-3