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Moridi, M; Tanner, S; Wyrsch, N; Farine, P.A.; Rohr, S (2009). A highly sensitive a-Si photodetector array with integrated filter for optical detection in MEMS. Procedia chemistry, 1(1), pp. 1367-1370. Amsterdam: Elsevier 10.1016/j.proche.2009.07.341
