Thermal Analysis of Parylene Thin Films for Barrier Layer Applications.

Buchwalder, Sébastien; Borzì, Aurelio; Diaz Leon, Juan J; Bourgeois, Florian; Nicolier, Cléo; Nicolay, Sylvain; Neels, Antonia; Zywitzki, Olaf; Hogg, Andreas; Burger, Jürgen (2022). Thermal Analysis of Parylene Thin Films for Barrier Layer Applications. Polymers, 14(17) MDPI 10.3390/polym14173677

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Biocompatible polymer films demonstrating excellent thermal stability are highly desirable for high-temperature (>250 °C) applications, especially in the bioelectronic encapsulation domain. Parylene, as an organic thin film, is a well-established polymer material exhibiting excellent barrier properties and is often the material of choice for biomedical applications. This work investigated the thermal impact on the bulk properties of four types of parylene films: parylene N, C, VT4, and AF4. The films, deposited using the standard Gorham process, were analyzed at varying annealing temperatures from room temperature up to 450 °C. Thermal properties were identified by differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA) methods, while X-ray diffraction (XRD) analysis showed the effect of high-temperature exposure on the structural properties. In addition to thermal and structural analysis, the barrier properties were measured through the helium transmission rate (HTR) and the water vapor transmission rate (WVTR). Fluorinated parylene films were confirmed to be exceptional materials for high-temperature applications. Parylene AF4 film, 25um thick, demonstrated excellent barrier performance after 300 °C exposure, with an HTR and a WVTR of 12.18 × 103 cm3 (STP) m-2 day-1 atm-1 and 6.6 g m-2 day-1, respectively.

Item Type:

Journal Article (Original Article)


04 Faculty of Medicine > Faculty Institutions > sitem Center for Translational Medicine and Biomedical Entrepreneurship
04 Faculty of Medicine > Department of Orthopaedic, Plastic and Hand Surgery (DOPH) > Clinic of Orthopaedic Surgery
08 Faculty of Science > School of Biomedical and Precision Engineering (SBPE)
08 Faculty of Science > School of Biomedical and Precision Engineering (SBPE) > Smart Surgical Instruments and Medical Devices

Graduate School:

Graduate School for Cellular and Biomedical Sciences (GCB)

UniBE Contributor:

Buchwalder, Sébastien, Burger, Jürgen


600 Technology > 610 Medicine & health








Pubmed Import

Date Deposited:

13 Sep 2022 12:37

Last Modified:

23 Oct 2023 22:53

Publisher DOI:


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Uncontrolled Keywords:

annealing helium transmission rate (HTR) parylene thermal stability vapor phase deposition water vapor transmission rate (WVTR)




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