Buchwalder, Sébastien; Bourgeois, Florian; Leon, Juan J. Diaz; Hogg, Andreas; Burger, Jürgen (2023). Parylene-AlOx Stacks for Improved 3D Encapsulation Solutions. Coatings, 13(11), p. 1942. MDPI 10.3390/coatings13111942
|
Text
coatings-13-01942-v2.pdf - Published Version Available under License Creative Commons: Attribution (CC-BY). Download (4MB) | Preview |
The demand for ultra-tight encapsulation solutions with excellent barrier and high conformality properties has increased in recent years. To meet these challenges, thin-film barrier coatings have emerged as a promising solution. In this study, we investigate well-established silicon-based plasma-enhanced chemical vapor deposition (PECVD) and metal oxide atomic layer deposition (ALD) barrier coatings deposited at low temperatures (≤100 °C) regarding their abilities to address high-level 3D encapsulation applications. Various combinations of such layers are evaluated by measuring the water vapor transmission rate (WVTR) and considering the conformality properties. The impact and the benefits of the organic film integration, namely parylene VT4 grade, on the barrier performances is assessed. Among these combinations, parylene-AlOx stack emerges as one of the most effective solutions, obtaining a WVTR of 3.1 × 10^−4 g m^−2 day^−1 at 38°C and 90% relative humidity conditions.
Item Type: |
Journal Article (Original Article) |
|---|---|
Division/Institute: |
08 Faculty of Science > School of Biomedical and Precision Engineering (SBPE) 08 Faculty of Science > School of Biomedical and Precision Engineering (SBPE) > Smart Surgical Instruments and Medical Devices |
Graduate School: |
Graduate School for Cellular and Biomedical Sciences (GCB) |
UniBE Contributor: |
Buchwalder, Sébastien, Burger, Jürgen |
Subjects: |
600 Technology > 610 Medicine & health 600 Technology > 620 Engineering |
ISSN: |
2079-6412 |
Publisher: |
MDPI |
Funders: |
[198] Innosuisse - Swiss Innovation Agency |
Language: |
English |
Submitter: |
Nicolas Gerber |
Date Deposited: |
21 Nov 2023 06:52 |
Last Modified: |
21 Nov 2023 06:52 |
Publisher DOI: |
10.3390/coatings13111942 |
BORIS DOI: |
10.48350/189210 |
URI: |
https://boris.unibe.ch/id/eprint/189210 |
Actions (login required)
 |
Edit item |