Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools

Bleiner, Davide (2014). Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools. In: Sebban, Stéphane; Gautier, Julien; Ros, David; Zeitoun, Philippe (eds.) X-Ray Lasers 2012. Proceedings of the 13th International Conference on X-Ray Lasers, 11–15 June 2012, Paris, France. Springer Proceedings in Physics: Vol. 147 (pp. 39-44). Cham: Springer 10.1007/978-3-319-00696-3_7

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Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

08 Faculty of Science > Institute of Applied Physics

UniBE Contributor:

Bleiner, Davide

Subjects:

600 Technology > 620 Engineering

ISSN:

0930-8989

ISBN:

978-3-319-00695-6

Series:

Springer Proceedings in Physics

Publisher:

Springer

Language:

English

Submitter:

Martin Frenz-Lips

Date Deposited:

05 Feb 2015 11:40

Last Modified:

18 Jun 2015 16:23

Publisher DOI:

10.1007/978-3-319-00696-3_7

URI:

https://boris.unibe.ch/id/eprint/62404

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