Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools

Bleiner, Davide (2014). Coherent short-wavelength plasma radiation for lab-scale nano-inspection tools. In: Sebban, Stéphane; Gautier, Julien; Ros, David; Zeitoun, Philippe (eds.) X-Ray Lasers 2012. Proceedings of the 13th International Conference on X-Ray Lasers, 11–15 June 2012, Paris, France. Springer Proceedings in Physics: Vol. 147 (pp. 39-44). Cham: Springer 10.1007/978-3-319-00696-3_7

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Item Type:	Conference or Workshop Item (Paper)
Division/Institute:	08 Faculty of Science > Institute of Applied Physics
UniBE Contributor:	Bleiner, Davide
Subjects:	600 Technology > 620 Engineering
ISSN:	0930-8989
ISBN:	978-3-319-00695-6
Series:	Springer Proceedings in Physics
Publisher:	Springer
Language:	English
Submitter:	Martin Frenz-Lips
Date Deposited:	05 Feb 2015 11:40
Last Modified:	05 Dec 2022 14:39
Publisher DOI:	10.1007/978-3-319-00696-3_7
URI:	https://boris.unibe.ch/id/eprint/62404