A highly sensitive a-Si photodetector array with integrated filter for optical detection in MEMS

Moridi, M; Tanner, S; Wyrsch, N; Farine, P.A.; Rohr, S (2009). A highly sensitive a-Si photodetector array with integrated filter for optical detection in MEMS. Procedia chemistry, 1(1), pp. 1367-1370. Amsterdam: Elsevier 10.1016/j.proche.2009.07.341

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Item Type:	Journal Article (Original Article)
Division/Institute:	04 Faculty of Medicine > Pre-clinic Human Medicine > Institute of Physiology
UniBE Contributor:	Rohr, Stephan
ISSN:	1876-6196
Publisher:	Elsevier
Language:	English
Submitter:	Factscience Import
Date Deposited:	04 Oct 2013 15:12
Last Modified:	05 Dec 2022 14:22
Publisher DOI:	10.1016/j.proche.2009.07.341
Web of Science ID:	000275995600126
URI:	https://boris.unibe.ch/id/eprint/31520 (FactScience: 196117)