Huang, Qiang; Baker-O`Neal, Brett; Kelly, James; Broekmann, Peter; Wirth, Alexandra; Martin, Marc; Hahn, Markus; Wagner, Anja; Mayer, Dieter
(2009).
Suppressor Effects during Copper Superfilling of Sub-100 nm Lines.
Electrochemical and solid-state letters, 12(4), D27-D31.
Pennington, NJ: Electrochemical Society
10.1149/1.3078074
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Item Type: |
Journal Article
(Original Article)
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Division/Institute: |
08 Faculty of Science > Department of Chemistry, Biochemistry and Pharmaceutical Sciences (DCBP) |
UniBE Contributor: |
Broekmann, Peter |
ISSN: |
1099-0062 |
Publisher: |
Electrochemical Society |
Language: |
English |
Submitter: |
Factscience Import
|
Date Deposited: |
04 Oct 2013 15:20 |
Last Modified: |
05 Dec 2022 14:24 |
Publisher DOI: |
10.1149/1.3078074 |
Web of Science ID: |
000263518300014 |
URI: |
https://boris.unibe.ch/id/eprint/36058 (FactScience: 203180) |
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