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Meier, Matthias; Bertsch, Dietmar; Onda, Nico; Etter, Marco; Gutsche, Martin; Dommann, Alex; Romano, Valerio; Nicolet, Marc-A (2006). Laser trimming of amorphous Ta42Si13N45 thin films with ultrashort pulses. Microelectronic engineering, 83(11-12), pp. 2234-2237. Amsterdam: Elsevier 10.1016/j.mee.2006.10.010
