Kelly, James

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Journal Article

Huang, Qiang; Baker-O`Neal, Brett; Kelly, James; Broekmann, Peter; Wirth, Alexandra; Martin, Marc; Hahn, Markus; Wagner, Anja; Mayer, Dieter (2009). Suppressor Effects during Copper Superfilling of Sub-100 nm Lines. Electrochemical and solid-state letters, 12(4), D27-D31. Pennington, NJ: Electrochemical Society 10.1149/1.3078074

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