Evaluation of Lab-scale EUV Microscopy using a Table-Top Laser Source

Bleiner, Davide; Staub, Felix; Guzenko, Vitaliy; Ekinci, Yasin; Balmer, Jürg (2011). Evaluation of Lab-scale EUV Microscopy using a Table-Top Laser Source. Optics communications, 284(19), pp. 4577-4583. Amsterdam: Elsevier 10.1016/j.optcom.2011.05.047

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Item Type:	Journal Article (Original Article)
Division/Institute:	08 Faculty of Science > Institute of Applied Physics
UniBE Contributor:	Bleiner, Davide, Staub, Felix, Balmer, Jürg
ISSN:	0030-4018
Publisher:	Elsevier
Language:	English
Submitter:	Factscience Import
Date Deposited:	04 Oct 2013 14:28
Last Modified:	05 Dec 2022 14:08
Publisher DOI:	10.1016/j.optcom.2011.05.047
Web of Science ID:	000294374700060
URI:	https://boris.unibe.ch/id/eprint/10161 (FactScience: 216009)